Thin Film Batteries: Production and Testing Methods

Information about our equipment to prepare and test thin film batteries

Physical Vapor Deposition (PVD)

Ar-Ion Sputter-Chamber 1

  • DC Kaufmann ion source (Veeco)
  • Only metals
  • High purity chamber (no airlock)

Ar-Ion Sputter-Chamber 2

  • DC Kaufmann ion source (Roth&Rau)
  • Only metals
  • Fast sample exchange (via airlock)

Ar-Ion Sputter-Chamber 3

  • RF- Ion Source (Roth&Rau)
  • For metals, oxides and nitrides (reactive gases: O2, N2)
  • Fast sample exchange (via airlock)

Mini Magnetron Sputter-Chamber

Glove boxes for preparation of electrochemical cells

MBRAUN UNIlab - Model Plus SP -

  • Purity: H2O < 1 ppm, O2 < 1 ppm
  • 1950 mm (W) x 780 mm (D) x 920 mm (H)
  • Airlock: < 5x10-2 mbar
  • Box pressure: ± 15 mbar
  • Integral leak rate <10-5 mbar l/s
  • Automatic regeneration
  • 36 l O2 & 1300 g H2O removal capacity

MBRAUN - Model MB150 B-G-II -

  • Purity: H2O < 1 ppm, O2 < 1 ppm
  • Air lock pressure: < 10-4 mbar
  • Integral  : <0,1 vol% / h
  • Box pressure: ± 20 mbar
  • Exchange: 50 m3/h
  • Operation from both sides possible
New setup for in operando investigation of Li-diffusion (top: photo; bottom: sketch)

Performance testing

Potentiostates

  • VSP-300 (BioLogic Science Instruments):
    • 6 channels
    • Measurements in electro chemical cells or inside glove box
  • Interface 1000 (Gamry Instruments):
    • With electro chemical quartz crystal microbalance: Gamry’s eQCM 10M™
    • Measurement of the temperature
    • With optical microscope (10x) and cell for investigation of electrochromic behavior (see image)
New setup for the investigation of optical switches of Li-ion electrodes: left: photo; right: sketch)

In operando optical reflectometry

  • Compact stabilized broadband lightsource (Thorlabs)
  • UV-Vis NIR spectrometer Exemplar® (BWTEK): 425 nm to 1000 nm

White Light Interferometer zygo

This image shows Guido Schmitz

Guido Schmitz

Prof. Dr. Dr. h.c.

Chair Professor

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