Thin Film Batteries: Production and Testing Methods

Information about our equipment to prepare and test thin film batteries

Physical Vapor Deposition (PVD)

Ar-Ion Sputter-Chamber 1

  • DC Kaufmann ion source (Veeco)
  • Only metals
  • High purity chamber (no airlock)

Ar-Ion Sputter-Chamber 2

  • DC Kaufmann ion source (Roth&Rau)
  • Only metals
  • Fast sample exchange (via airlock)

Ar-Ion Sputter-Chamber 3

  • RF- Ion Source (Roth&Rau)
  • For metals, oxides and nitrides (reactive gases: O2, N2)
  • Fast sample exchange (via airlock)

Mini Magnetron Sputter-Chamber

Glove boxes for preparation of electrochemical cells

MBRAUN UNIlab - Model Plus SP -

  • Purity: H2O < 1 ppm, O2 < 1 ppm
  • 1950 mm (W) x 780 mm (D) x 920 mm (H)
  • Airlock: < 5x10-2 mbar
  • Box pressure: ± 15 mbar
  • Integral leak rate <10-5 mbar l/s
  • Automatic regeneration
  • 36 l O2 & 1300 g H2O removal capacity

MBRAUN - Model MB150 B-G-II -

  • Purity: H2O < 1 ppm, O2 < 1 ppm
  • Air lock pressure: < 10-4 mbar
  • Integral  : <0,1 vol% / h
  • Box pressure: ± 20 mbar
  • Exchange: 50 m3/h
  • Operation from both sides possible
New setup for in operando investigation of Li-diffusion (top: photo; bottom: sketch)

Performance testing

Potentiostates

  • VSP-300 (BioLogic Science Instruments):
    • 6 channels
    • Measurements in electro chemical cells or inside glove box
  • Interface 1000 (Gamry Instruments):
    • With electro chemical quartz crystal microbalance: Gamry’s eQCM 10M™
    • Measurement of the temperature
    • With optical microscope (10x) and cell for investigation of electrochromic behavior (see image)
New setup for the investigation of optical switches of Li-ion electrodes: left: photo; right: sketch)

In operando optical reflectometry

  • Compact stabilized broadband lightsource (Thorlabs)
  • UV-Vis NIR spectrometer Exemplar® (BWTEK): 425 nm to 1000 nm

White Light Interferometer zygo

This image shows Patrick Stender

Patrick Stender

Dr.

Sr. Scientist

This image shows Guido Schmitz

Guido Schmitz

Prof. Dr. Dr. h.c.

Chair Professor

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