Transmission Electron Microscopes (TEM)
Spectra 300 (Thermo Fisher Scientific)
New Highlight at the IMW and currently in construction: First use: 04/2022
Operation within the research network AMICA:
- Schottky Field Emission Transmission Electron Microscope (30-300kV)
- Cs S-CORR Probe corrector for optimum operation in STEM
- Point resolution: 100 pm (TEM @300 kV) | 50 pm (STEM @300 kV) | 125 pm (STEM @30 kV)
- Monochromator (with autoalignment): z.B. 0,14 nm Spotsize at 0,3 eV, 0,5 nA @300 kV | 0,14 nm Spotsize at 0,2 eV, 0.1 nA @ 60 kV
- STEM-Detectors (BF, ADF, HAADF, iDPC)
- 4D-STEM Direct elektron detector Quantum Merlin 1R (up to 2400 Hz and starting at 24 bit/px)
- Ceta 16M camera (4K x 4K at 40 fps and 512x512 at 320 fps)
- Super-X EDS-system (<136 eV, 0,7 sr, Fiori-number> 4000)
- EELS Continuum S/1077 Spektrometer (< 2600 spektra/s at 30-300 kV)
- Gatan Elsa cryo transfer holder + pumping station
- Tomography holder for tilt series of up to ±70°
- In-situ holder (Fusion Select MEMS by Protochips) for heating and simultaneous electrical measurements
- Additonal sample holders: single tilt, two analytical double tilt holders (with hex-ring and clip-mechanism)
- NanoMEGAS-System (compatibel with Merlin 1R STEM-Detector)
CM-200 (Philips)
- Schottky FEG (160, 200 kV)
- Cs: 1,2 mm
- Super-Twin Lens
- Information limit: 0.10 nm, Point resolution: 0.24 nm
- Beam current: e.g. 0.3 nA at 1 nm probe | 15 nA at 10 nm probe
- STEM-Mode
- Single tilt holder, two double tilt holders, APT-tip holder
- SUTW EDX System of EDAX
Scanning Electron Microscopes (SEM)
- Schottky-FEG (0.2 bis 30 kV), Beam current: 1 pA - 400 nA, Resolution: 1.0 nm at 15 kV
- Field emission ion optic with Ga- ion emitter (0.5 kV to 30 kV), beam current: 0.6 pA - 65 nA
- Stage travel range: x,y = 110 mm, z = 65 mm, tilt: -15° bis +90°
- Low Vacuum environment possible
- Gas-Injection-System (Pt, C, SCM)
- Detectors: Trinity Detection system, ETD, retractable CBS BSE, Gaseous Analytical Detektor, ICE
- IR-CCD camera
- Pixel density 4-stages of choice up to 6144 x 4096 px
- Beam Deceleration and charge neutralisation
- EasyLift Nanomanipulalator EX
- Loader for TEM Grids
- Software: AutoSlice and View, Avizo
- EDAX Team EDX System (Octane Super SDD)
- EDAX Team EBSD System (Hikari XP CCD Kamera)
- Cryo-sample holder and Cryo Interlock Kit
- Direct Connection to Modular TAP
- Wolfram cathod (0.2 - to 30 kV)
- Beam current: < 2 μA
- Resolution: 3 nm at 30 kV
- Hoch vacuum: <6x10-4 Pa, ESEM: 10 - 2600 Pa
- Stage travel range: x,y = 50 mm, z = 25 mm, tilt: -15° bis +75°
- Detectors: ETD, GSED, Large Field GSED, DBS RE contrast detector
- CCD-camera
- Pixel density 4-stages of choice up to 6144 x 4096 px
- SDD EDX-System
- Heating table: up to 1000°C
- Auxiliary Gas Kit
- Kleindiek Nanotechnik MM3A-EM Micromanipulator
Patrick Stender
Dr.Sr. Scientist
Guido Schmitz
Prof. Dr. Dr. h.c.Chair Professor
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- Appointments by arrangement